1. Features
Performance reliability: overall composite rotor, high strength, stable performance;
Clean oil-free: adopt with grease lubricated precision ceramic bearings ,no oil vapor contamination;
Any angle: can be installed at any angle for easy system integration;
Easy to use: water, electricity, gas interface connection simple and convenient, customers can choose air or water cooled depending on the usage environment and conditions ;
Wide application: for mass spectrometry, surface physics, coating, ion etching, physics and other fields;
2.Technical Index
|
Model |
MP-100/110 |
|
Pumping rate (L / s) |
110 |
|
Exhaust port flange |
KF25(DN25 KF) |
|
Air inlet flange |
DN100 LF、DN100 CF |
|
Compression ratio |
N2：108； H2：5×102 |
|
Ultimate pressure (Pa) |
≤6×10-6 (DN100 LF) |
|
≤6×10-7 (DN100 CF) |
|
|
Recommended to start pressure (Pa) |
＜100 |
|
Rated speed (rpm) |
42300 |
|
Start Time (min) |
＜2 |
|
Bearing |
Precision greased ceramic bearings |
|
Vibration value ((mm)) |
≤0.1 |
|
Recommendations before the pump (L / s) |
2 |
|
Amount of oil (ml) |
Grease lubrication |
|
Tap |
An inner diameter Φ10-line self-sealing |
|
cooling method |
Air-cooled or water-cooled |
|
Cooling water flow (L / min) |
1 |
|
Cooling water pressure (mpa) |
0.15 |
|
Cooling water temperature (℃) |
≤25 |
|
Pump baking temperature (℃) |
≤100 |
|
Ambient Temperature (℃) |
5-40 |
|
Lubrication |
Grease lubrication |
|
Mounting direction |
Any angle |
|
Weight (kg) |
8 |
