1. Features
Performance reliability: overall composite rotor, high strength, stable performance;
Easy to use: water, electricity, gas interface connection simple and convenient, customers can choose air or water cooled depending on the usage environment and conditions ;
Wide application: for mass spectrometry, surface physics, coating, ion etching, physics and other fields;
2. Technical Index
| Product Model |
MP-160/700 |
|
|
Air inlet flange |
DN160LF |
DN160CF |
|
Pumping speed L / S (air) |
700 |
|
|
Compression ratio N2 |
＞109 |
|
|
Ultimate pressure (Pa) |
6×10-7 |
6×10-8 |
|
Exhaust port flange |
KF40 |
|
|
Using a bearing |
Ceramic grease lubricated bearings |
|
|
Start Time (min) |
＜4 |
|
|
Rated operating number of revolutions (rpm) |
36000 |
|
|
Recommended to use Pre stage pump L / S |
4-8 |
|
|
Cooling mode and water temperature |
Water-cooled，≤25℃ |
|
|
Mounting |
Any angle |
|
|
Pump baking temperature (℃) |
＜120 |
|
|
Ambient Temperature (℃) |
5～40 |
|
|
Weight (kg) |
19 |
|
