1. Features
Performance reliability: overall composite rotor, high strength, stable performance;
Easy to use: water, electricity, gas interface connection simple and convenient, customers can choose air or water cooled depending on the usage environment and conditions ;
Wide application: for mass spectrometry, surface physics, coating, ion etching, physics and other fields;
2. Technical Index
| Product model |
MP-200/1300 |
|
|
Air inlet flange |
DN200LF |
DN200CF |
|
Pumping speed L / S (air) |
1300 |
|
|
Compression ratio N2 |
＞109 |
|
|
Ultimate pressure (Pa) |
＜6×10-6 |
＜6×10-7 |
|
Exhaust port flange |
KF40 |
|
|
Using a bearing |
Ceramic grease lubricated bearings |
|
|
Start Time (min) |
＜6 |
|
|
Rated speed (rpm) |
24000 |
|
|
Recommended to use pre-stage pump (L / S) |
8-12 |
|
|
Mounting |
Any angle |
|
|
Cooling mode and water temperature |
Water cooling，≤25℃ |
|
|
Working temperature (℃) |
5～40 |
|
|
Weight (kg) |
29 |
|
