1200℃ PECVD Vacuum Tube Furnace
VTF-PECVD Series
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Product info
VTF-PECVD vacuum tube furnace system (plasma enhanced chemical vapor deposition system) consists of four modules: tube furnace, vacuum acquisition, flow control and RF power supply. This equipment uses 13.56Mhz RF output to ionize the gas containing the atoms that make up the film, forming plasma in the vacuum chamber. The strong chemical activity of plasma is used to improve the reaction conditions, so that the gaseous substances containing the film components undergo chemical reactions, thereby realizing a new preparation technology for the growth of thin film materials. Finally, the desired film is deposited on the substrate. It is suitable for the deposition of SiO2 and SiNx films at 1200℃.
Product Description
The VTF-PECVD tube furnace system consists of a tube furnace, vacuum acquisition, flow control and RF power supply.
The tube furnace can choose different tube diameters and constant temperature zone lengths. Both ends of the furnace tube are equipped with high vacuum stainless steel sealing flanges.
The vacuum acquisition system can select different vacuum pumps according to the test requirements. The vacuum degree of the rotary vane mechanical vacuum pump is ≤5Pa, and the vacuum degree of the molecular pump vacuum unit is 1x10-4Pa.
The gas supply system can choose 3-way float manual and 3-way automatic mass flow system
Vacuum measurement is by digital compound vacuum machine or Pirani vacuum gauge
The plasma discharge uses a 13.56Mhz power supply, and the power output can be selected from 200W, 300W and 500W. The camp furnace can choose a single temperature zone of 300mm and 440mm, or three or more temperature zones for temperature gradient testing.
The thermostat has a built-in RS485 digital communication port and a USB adapter as an optional configuration, which can be connected to a PC for remote control and monitoring of the system, and can also save or export test results
The product complies with EU CE standards
Technical Parameters
model | VTF-PECVD4012 | VTF-PECVD6012 | VTF-PECVD8012 | VTF-PECVD10012 |
Furnace tube size | φ40x1200mm | φ60x1200mm | φ80x1200mm | φ100x1200mm |
Rated temperature | 1200℃ | |||
Operating temperature | 1100℃ | |||
Heating zone size | 300mm/440mm | |||
Supply voltage | 220V/1.8KW | 220V/2.6KW | 220V/2.6KW | 220V/2.6KW |
Heating elements | HRE Iron-Chromium-Aluminum Alloy Resistance Wire | |||
Furnace material | Polycrystalline inorganic alumina ceramic fiber material prepared by wet vacuum filtration molding | |||
Furnace pipes | Quartz tube | |||
Temperature control accuracy | ±1℃ | |||
Temperature measuring element | N-type thermocouple | |||
Temperature control instrument | Intelligent microcomputer PID temperature control instrument, SCR/SSR control, PID parameter self-tuning function; 30 programmable time periods, program heating, program insulation, program cooling | |||
Heating rate | 1-25℃/min freely adjustable | |||
Furnace structure | Furnace temperature control integrated structure, furnace opening and closing; double-layer shell, air circulation and heat insulation | |||
Sealing performance | Both ends of the furnace tube are equipped with stainless steel metal flanges and high-temperature PTFE gaskets. They can work under vacuum, and the vacuum degree is ≤5pa (rotary vane vacuum pump) | |||
RF Power | Frequency: 13.56 MHz ± 0.005%, Power: 5W-500W, Power stability: ± 0.5% | |||
Gas Control | Optional 3-way float manual flow meter, range 60-600ml/min; 3-way automatic mass flow meter, range 1-500sccm | |||
Atmosphere performance | There are air inlet and air outlet at both ends of the flange. The pressure gauge is installed on the metal flange. The precision needle valve can adjust the air inlet and outlet volume. Protective gases such as nitrogen, argon, and hydrogen can be introduced. | |||
Gas line interface | KF25 vacuum baffle valve and KF25 stainless steel bellows connect the vacuum pump; protective atmosphere 6mm stainless steel ferrule connector and PTFE pipe | |||
Device protection | Modular control, which will send out sound and light alarm signals for over-temperature and broken circuit in the working process, and automatically complete the protection action | |||
Security protection | The equipment is equipped with a circuit breaker, which will automatically pop open in the event of a short circuit or leakage, thus protecting the equipment and operators. | |||
shell | High-quality cold-rolled steel plates are processed by CNC machine tools, and then welded, ground, polished, phosphated, pickled, and electrostatically sprayed with plastic powder on the surface. | |||
Quality Certification | ISO9001 CE SGS TUV | |||
